FocusTrac™ Laser Auto Focus Systems

FocusTrac™ Laser Auto Focus System from Motion X Corporation provides real time focus for most infinite conjugate microscope systems including those manufactured by Olympus, Leica, Nikon, Zeiss, and Mitutoyo. It can also be configured to work with many older finite conjugate microscope systems as well as individual telecentric optics. The FocusTrac™ is able to differentiate between "in-focus", "above focus" and "below focus" conditions to produce a relative error signal that can be used to drive the position of the microscope and optics relative to the sample of interest into an “in focus” condition.

Motion X Corporation also offers the FocusTrac™ Laser Auto Focus System in a low profile configuration as well as other custom configurations.

FocusTrac main
FocusTrac main
Low Profile Laser Auto Focus
Low Profile Laser Auto Focus
FTPIFOCPICS-012
FTPIFOCPICS-012
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Downloads

Autofocus Assembly Overall DimensionsAutofocus Assembly Overall Dimensions (PDF, 42KB)

Low Profile Autofocus Assembly Overall DimensionsLow Profile Autofocus Assembly Overall Dimensions (PDF, 162KB)

FocusTrac™ Laser Auto Focus SystemsFocusTrac™ Laser Auto Focus Systems (PDF, 741KB)

Specifications

Laser
405 nm Class 1
635 nm Class 1
780 nm Class 1
Input Voltage (DC)
± 12 V
Current
600 mA
Temperature
50-90 ºF
10-32 ºC
Humidity
40-90 %
Length
7.9 in
20 cm
Width
3.9 in
9.9 cm
Height
1.6 in
4.1 cm
Weight
3.5 lbs
1.3 kg

Technical Information

Motion X Corporation’s FocusTrac™ Laser Auto Focus System is extremely flexible and can be offered in many configurations that will suit your application's requirements. We invite you to contact our sales department to get more information with regard to our FocusTrac™ Laser Auto Focus System.

Applications

The FocusTrac™ Laser Auto Focus System, with its superior performance and bandwidth range, can be applied to a diverse range of applications including: semiconductor wafer and device inspection, hard disk read write head and disk inspection, razor blade inspection, photovoltaic substrate inspection, micro-electro-mechanical systems (MEMS) device inspection, flat panel display inspection, ink-jet substrate inspection, reflective optics inspection, photovoltaic inspection, biomedical, diamond fly cutting, laser ablation, and a number of other automated inspection and vision based applications. If used in tandem with a linear feedback device, such as a glass scale encoder or other transducer, the FocusTrac™ can also be utilized in automated height measurements for both static and dynamic applications.

The benefits of using the FocusTrac™ Laser Auto Focus System include: A substantial increase in throughput and a significant reduction in processing time for a given automated inspection system. In the case of a manual inspection system, it provides both a substantial increase in throughput as well as improved ergonomics, greatly reducing operator fatigue and error.

Example FocusTrac™ Laser Auto Focus Applications

Data Storage
FocusTrac™ Laser Auto Focus Systems are used in hard disk drive component inspection systems. These include inspection of both read write heads and media. In the case of read write heads, the system consists of a precision X - Y stage and Z column, optical microscope, CCD camera, frame grabber, motion controller, FocusTrac™ and host computer. The system is designed to inspect trays full of read write head sliders prior to the heads being assembled into head gimble assemblies (HGAs). By reviewing the pole tips on the sliders and capturing the dimensions of these pole tips the system is able to determine which sliders are manufactured properly without electrically testing the head itself. The automation of this process utilizing the laser auto focus results in significant increases in throughput and reduction of personnel required to perform the inspection.
Semiconductor
FocusTrac™ Laser Auto Focus Systems are used in semiconductor inspection systems. These include inspection of wafers, bag assemblies, and discrete devices. In the case of wafer inspection, the FocusTrac™ has been applied to a number of automated optical inspection systems for defect review and critical dimension inspection. Systems use the FocusTrac™ to map the wafer Z heights under an optical microscope before moving the wafer under the inspection laser/imaging system and applying the mapped information to the tool to make the necessary adjustments in Z to maintain focus during the actual inspection process. The result is a significant increase in throughput and also a reduction of errors in the process.
Ink Jet
FocusTrac™ Laser Auto Focus Systems are used in ink jet mask inspection systems. The system consists of a precision X - Y open frame stage with a transmitted light illumination system and Z column, optical microscope, CCD camera, frame grabber, motion controller, FocusTrac™, an air bearing objective actuator and host computer. The system is designed to inspect ink jet masks for defects in individual nozzles prior to the mask being diced into cartridge size components. Automation of the system requires constant velocity of the X - Y stage, which is phase lock looped with the strobe of the illumination and triggering of the vision system to capture img on the fly. The key to this is maintaining constant focus of the image; this is accomplished through the use of the LAF and also requires the use of a custom designed air bearing actuator to move the 3x objective at a band width of > 50Hz. The automation of this process utilizing the FocusTrac™ results in significant increases in throughput and reduction of personnel required to perform the inspection.
Razor Blade
FocusTrac™ Laser Auto Focus Systems are used in razor blade inspection systems. The system consists of a precision X - Y stage and Z column, optical microscope, CCD camera, frame grabber, motion controller, FocusTrac™ and host computer. The system is designed to inspect razor blades capturing the points of the 3 angle transitions on the blades edge. The system is able to determine which blades are manufactured properly without destructive testing. The automation of this process utilizing the FocusTrac™ results in significant increases in throughput and reduction of personnel required to perform the inspection.
Reflective Optics
FocusTrac™ Laser Auto Focus Systems are used in reflective optic inspection systems. Inspection of reflective optics requires an auto focus system capable of finding focus on very flat spectral surfaces. This is a very difficult task for a video based auto focus system due to the lack of topography on the optic being inspected. The FocusTrac™ Laser Auto Focus is ideal for this application since it does not require topography to find focus, unlike a video based auto focus system, the FocusTrac™ Laser Auto Focus System uses the reflective nature of the optic being inspected for its return signal. Use of the FocusTrac™ Laser Auto Focus in an reflective optic inspection system has the potential to increase the throughput of the inspection process by 10X or greater. The FocusTrac™ Laser Auto Focus can also be used in some non-reflective optic inspection systems, but this is dependent on the optical material and dimensions of the optic to be inspected.
Photovoltaic (PV)
FocusTrac™ Laser Auto Focus Systems are used in PV inspection systems. The spectral characteristics of the photovoltaic materials are very similar to those of semiconductors but without the topology resulting in an ideal surface for the FocusTrac™ to function. Use of the FocusTrac™ in PV inspection has the potential to increase the throughput of inspection processes by 10x or greater.
Diamond Fly Cutting
FocusTrac™ Laser Auto Focus Systems are used in diamond fly cutting tools used to remove material and produce a highly polished surface quality on focal plane arrays (FPAs). In the application, the FocusTrac™ is used to determine the offset between the cutting tool and the top surface of the FPA to be cut. The use of FocusTrac™ in this system eliminates the need for the operator to manually find the relationship of the cutting tool to the surface to be cut resulting in a significant increase in throughput and uniformity of the performance of the diamond fly cutting tool.
Micro-Electro-Mechanical Systems (MEMS) Devices
FocusTrac™ Laser Auto Focus Systems are used in inspection systems for defect review of (MEMS) devices. The FocusTrac™ is integrated into a (MEMS) inspection microscope system to review the wafer level dies before dicing into individual devices. The use of the FocusTrac™ in this system results in a substantial increase of throughput and reduction of operator errors in the inspection process.
Laser Ablation
FocusTrac™ Laser Auto Focus Systems are used in a number of laser ablation systems including; direct write lithography, flat panel display (FPD) repair tools, laser cutting, hole drilling and welding systems.

Focus Method

The FocusTrac™ was designed specifically to project a laser image onto the surface of a sample being imaged. The laser image can be configured as a spot or a line with different lengths. The line has the distinct advantage of integrating the focus information over the entire topology of the Field of View. This line integration reduces hunting and is far less confused by high-relief wafers. Spot-based systems lack this important capability.

Focus Method

Technical Data

Signal Characteristics

Transmission Characteristics

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