Item # MX-MD-06-10-01, 6 Inch Travel Plane Mirror

Dual Axis Mirror configurations are used in DMI systems where there is more than one axis being positioned or monitored on a given system.

Motion X Corporation’s Dual Axis Mirror configurations are designed in a compact footprint to work in even the most space-constrained applications and in many cases, a single laser source can support multiple axes to reduce overall system cost.

Plane mirror, 6-inch travel, 1/10th wave surface flatness, unmounted

Mirror (Dual Axis)
Mirror (Dual Axis)
Mirror (Dual Axis)
Mirror (Dual Axis)
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Specifications

Mount Type
Unmounted
Flatness
1/10th wave surface flatness
Travel Size
6 in
Dimension A
7.562 in
Dimension B
8.000 in
8.125 in
Dimension C
7.000 in

Applications

DMIs are the primary measurement device for high-precision stage metrology in semiconductor metrology tools and lithography processes for the production of integrated circuits (ICs) and flat panel displays (FPDs). Additional applications include; characterization and calibration of machine tools, stages, piezoelectric transducers, encoders and grid plates.

Technical Information

Motion X Corporation’s line of homodyne DMI systems and components is extremely flexible and can be offered in many configurations that will suit your applications requirements. Our price versus performance is unmatched in the DMI market and we invite you to contact our sales department for more information regarding our line of DMI systems and DMI system components.

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