Item # MX-BS-10-66-SM, 1.0 Inch Beam Splitter

Beam Splitter configurations are used in DMI systems where one laser source is used for feedback on more than one axis at a time on a given system thereby reducing overall system cost.

Motion X Corporation’s Beam Splitter configurations are designed in a compact footprint to work in even the most space-constrained applications.

Beam splitter, 1.0-inch, 66 % transmissive 34 % reflective, no adjustment mount


Mount Type

No Adjustment Mount


1.0 in


66 %


34 %


DMIs are the primary measurement device for high-precision stage metrology in semiconductor metrology tools and lithography processes for the production of integrated circuits (ICs) and flat panel displays (FPDs). Additional applications include; characterization and calibration of machine tools, stages, piezoelectric transducers, encoders and grid plates.

Technical Information

Motion X Corporation’s line of homodyne DMI systems and components is extremely flexible and can be offered in many configurations that will suit your applications requirements. Our price versus performance is unmatched in the DMI market and we invite you to contact our sales department to get more information regarding our line of DMI systems and DMI system components.